CODEX™ Stocker

CODEX™ Stocker

INTEGRATED STOCKER, SORTER AND METROLOGY SYSTEM

Genmark Automation’s CODEX Stocker is built on proven Genmark technologies found in production globally. The tool integrates stocking, sorting and metrology tool functions in a single tool to store and deliver various substrates:

  • On demand
  • Of defined properties
  • In defined numbers

Consolidating the functions of these traditionally nonrevenue-generating tools frees up fab floor space for production equipment, enabling a facility to maximize its productivity and yield:

  • Novel rotary “carousel” module increases the capacity of substrates stored compared with existing rack systems, requiring less fab floorspace, allowing the robot to access the substrates from a single side
  • Integrated stocker and metrology systems enable real-time measurement and data tracking. Storing all substrates in a single location allows for more effective tracking of the wafer/reticle life cycle
  • Gantry robot provides extended working envelope for wafer delivery
  • Requires less clean room space
  • Live time data tracking
  • Integrated metrology capability
  • Potentially eliminates inspection tools
  • Eliminates sorter tools
  • Software enables all typical sorter functions

 

Key features include:

  • codexStockerHigh capacity: 5000 substrates, L x W x H (3089” x 2639” x 2900”)
  • High modularity, configurability and expandability – adding 3089” x 2639” x 2900” modules
  • Recommended stocker modules per tool – 2
  • Performance optimized for high throughput
    • Motion blending capability
  • System architecture enables multiple approaches and design
    • DFX (DFR, DFS, DFM, etc.)
  • Reduced part count for high reliability
  • Enhanced diagnostic and troubleshooting capabilities
  • Easy to set up and operate
  • Effective carrier teaching
  • Flexibility – can store different size and geometry substrates by customizing the boats
  • Warped substrate handling capabilities
  • Substrate flipping capabilities
  • Substrate edge defect detection
  • Low / High Frequency (200 / 300 mm) carrier ID reading capabilities
  • On-the fly substrate centering
  • QR barcode reading capabilities
  • Local and remote control through SECS/GEM interface
  • Remote software updating and diagnostics
  • CE, S2-S8 SEMI compliance

 

Contact us for more information at: Mktg-Sales@GenmarkAutomation.com